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Model 6100 MEMS Inclinometer Probe

The Model 6100 MEMS Inclinometer Probe uses two Micro-Electro-Mechanical Systems (MEMS) sensors as the basic tilt sensors. These sensors combine silicon-based microelectronics with micromachining technology.

The Model 6100 is used in conjunction with inclinometer casing for the biaxial measurement of lateral earth movements that might occur in unstable slopes, landslides, dam and roadway embankments, and landfills. The MEMS Inclinometer Probe can also be used to measure deflections in the walls of excavations, shafts, tunnels, and in caissons, piles, and sheet piling. The Model 6100 has a waterproof, stainless steel housing containing two MEMS transducers, one with its axis in the plane of the spring-loaded wheels; the other installed at 90°. A stainless steel carrying case is optional.

Compared to the Geokon Model 6000 Inclinometer Probe , which, conventionally, uses a force balance accelerometer as the basic tilt sensor, the MEMS inclinometer has the same outward appearance and functionality, with the same stability and resolution (10 arc seconds), and total system accuracy (6 mm/30 m). The main advantages of the MEMS probe are: (i) significant reduction in cost along with (ii) some gain in robustness.

The range of the MEMS probe is limited to ±15 degrees; sufficient for all nominally vertical inclinometer casings. For horizontally deployed inclinometer casings (for measuring differential settlements), the Model 6115 MEMS Horizontal Inclinometer Probe is available.

Geokon MEMS inclinometer probes can be read with the latest version of the Model GK-603 Readout Box. Older models of the Model GK-603 can be easily modified to read the MEMS probe by the addition of updated firmware.

MEMS technology is also available in tiltmeters, in-place inclinometers, and horizontal in-place inclinometers.

For more information, please contact Geokon »

 Model 6100 photo.

Model 6100 MEMS Inclinometer Probe.

[ pdf data sheet ]